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Engineering Center of Ministry of Education on Micro and Nano Manufacturing and Measuring Technology

Micro and Nano Manufacturing and Measuring Technology Engineering Center, namely Tianjin’s micro and nano manufacturing technology engineering center(MNMT) , is supported by school of precision instrument and optoelectronics engineering, national key laboratory of precision measurement technology and instrument, research institute of micro and nano measurement and equipment and it mainly specialize in industrialized work like micro electromechanical system, Ultra-precision micro-nano processing as well as micro and nano measurement and equipment.

 

In terms of micro electro mechanical system (MEMS), based on the film body acoustic resonance technique, NAMT has made breakthrough progress in MEMS filter and oscillator, frontier research and industrialized application of sensor. Meanwhile it has forged the unique experiment line integrating design, processing, packaging and test together among national colleges and universities, and has established in-depth partnership featuring combining production, teaching and research with many famous enterprises and has created specialized enterprise through bring in foreign capitals.

 

In terms of ultra-precision micro-nano processing, MNMT focus on the research and development of many aspects including optical free-form surface machining, complex curved surface machining of hard and brittle materials, focused ion beam nano machining, precision micro injection molding and die casting technique. It has upheld innovative research on frontier scientific field so as to obtain innovative results with independent intellectual property rights. And also it has cultivated and agglomerated innovative talents to establish the communication platform for high-level experiment technology and international academy. In the meantime it has provided difficult processing services for colleges and universities, institutes and enterprises, among which there are over one hundred units at home and abroad. The technology of MNMT has leaped to the international forefront.

 

In terms of micro-nano measuring and equipment, concentrated on research on new high-end micro-nano scale measurement techniques and relative instruments, MNMT has achieved serialized innovative results in micro structure optical testing technology(micro-vision, reflectance difference spectroscopy, micro interference and three dimensional x-ray imagining microscopy)and scanning probe test technology. It has Independently developed several sets of microstructure geometry and mechanical capacity optical test systems and atomic force microscopy. Meanwhile it has solved a series of international measurement problems such as real-time monitoring of ultra- thin film growth, the surface morphology and related cross-scale geometric precision measurement, MEMS dimensional coupled motion characteristics measured submicron three-dimensional perspective microscopic imaging. And its technical level is in the leading position.

 

MNMT has one Changjiang Scholar, one thousand innovative people, two thousand young people and a research - industry collaborative team made up of 20 professors, associate professors and 30 engineers. The support center has made substantial development in strategic emerging industries like new generation information technology and high-end equipment manufacturing. It has also expanded critical applications in numerous frontier and chief fields such as advanced manufacturing, micro-electronics, instrument and sensor, material, biology, rock minerals and nation defense so as to effectively promote the upgrading of micro nano manufacturing field of scientific research and industrialization level in China.